High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory
نویسندگان
چکیده
منابع مشابه
Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system.
The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer-Zernike theory allows the retrieval of the complex pupil function of the imaging system, including aberrations as well as transmission variatio...
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Taking the classical Ignatowsky/Richards and Wolf formulas as our starting point, we present expressions for the electric field components in the focal region in the case of a high-numerical-aperture optical system. The transmission function, the aberrations, and the spatially varying state of polarization of the wave exiting the optical system are represented in terms of a Zernike polynomial e...
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ژورنال
عنوان ژورنال: Journal of the European Optical Society: Rapid Publications
سال: 2007
ISSN: 1990-2573
DOI: 10.2971/jeos.2007.07011e